A Guide to Hands-on MEMS Design and Prototyping by Kubby PDF

By Kubby

ISBN-10: 0521889251

ISBN-13: 9780521889254

ISBN-10: 1107645794

ISBN-13: 9781107645790

no matter if you're a pupil taking an introductory MEMS path or a practicing engineer who must wake up to hurry quick on MEMS layout, this sensible consultant presents the hands-on event had to layout, fabricate and try out MEMS units. you'll find out how to use foundry multi-project fabrication methods for inexpensive MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. quite a few layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, in addition to workouts and layout demanding situations on the finish of each bankruptcy. suggestions to the layout problem difficulties are supplied online.

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A Guide to Hands-on MEMS Design and Prototyping by Kubby

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